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Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings

  • Published:2017-11 Issue: Volume:725 Page:877-883
  • ISSN:0925-8388
  • Container-title:Journal of Alloys and Compounds
  • language:en
  • Short-container-title:Journal of Alloys and Compounds

Author:

Zhang Xin,Zhou Yan-Wen,Gao Jian-Bo,Zhao Zhi-Wei,Guo Yuan-Yuan,Xie Zhi-Wen,Kelly Peter

Funder

National Natural Science Foundation of China

School Enterprise Cooperation and Achievement Transformation Project of Liaoning Province Education Department

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference23 articles.

1. Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system;Kelly;J. Vac. Sci. Technol. A Vac. Surf., Films,1998

2. Magnetron sputtering: a review of recent developments and applications;Kelly;Vacuum,2000

3. Application of Ti(Al) based nanocomposite coatings on cast aluminum molds by plasma enhanced magnetron sputtering;Li;China Surf. Eng.,2012

4. The structure and toughness of TiN coatings prepared by modulated pulsed power magnetron sputtering;Li;Vacuum,2016

5. Tribological performance of TiN coatings deposited on 304L stainless steel used for olive-oil extraction;Bahri;Wear,2015

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