Process exploration of β-Ga2O3 blind hole processing by water-assisted femtosecond laser technology
Author:
Funder
National Natural Science Foundation of China
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference35 articles.
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3. Ultrahigh deep-ultraviolet responsivity of a β-Ga2O3/MgO heterostructure-based phototransistor;Ahn;ACS Photonics,2021
4. Temperature-dependent Raman and photoluminescence of β-Ga2O3 doped with shallow donors and deep acceptors impurities;Zhang;J. Alloy. Compd.,2021
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