A perspective on <b><i>β</i></b>-Ga<sub>2</sub>O<sub>3</sub> micro/nanoelectromechanical systems-Reference-Cited by-同舟云学术

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A perspective on β-Ga₂O₃ micro/nanoelectromechanical systems

Published:2022-01-24 Issue:4 Volume:120 Page:040502
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Zheng Xu-Qian¹^ORCID,Zhao Hongping²³^ORCID,Feng Philip X.-L.¹^ORCID

Affiliation:

1. Department of Electrical and Computer Engineering, Herbert Wertheim College of Engineering, University of Florida, Gainesville, Florida 32611, USA

2. Department of Electrical and Computer Engineering, The Ohio State University, Columbus, Ohio 43210, USA

3. Department of Materials Science and Engineering, The Ohio State University, Columbus, Ohio 43210, USA

Funder

National Science Foundation

Defense Threat Reduction Agency

Air Force Office of Scientific Research

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://aip.scitation.org/doi/am-pdf/10.1063/5.0073005

Reference40 articles.

1. Current Status and Emerging Trends in Wide Bandgap (WBG) Semiconductor Power Switching Devices

2. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

3. MEMS/NEMS Devices and Applications

4. Gallium Nitride as an Electromechanical Material

5. A review of Ga2O3materials, processing, and devices

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1. A self-powered Ag/β-Ga2O3 photodetector with broadband response from 200 to 980 nm based on the photovoltaic and pyro-phototronic effects;Journal of Materials Science & Technology;2025-01

2. Unraveling intrinsic mobility limits in two-dimensional (AlxGa1−x)2O3 alloys;Journal of Applied Physics;2024-06-11

3. The anisotropy of deformation behaviors in (100) and (010) plane of monoclinic β-Ga2O3 single crystals;Journal of Alloys and Compounds;2024-03

4. Surface Adsorption and Air Damping Behavior of β‐Ga₂O₃ Nanomechanical Resonators;Advanced Materials Technologies;2024-01-16

5. New Generation Beta‐Gallium Oxide Nanomaterials: Growth and Performances in Electronic Devices;Advanced Engineering Materials;2023-07-28

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