Effect of in-situ Zn doping on suppression of phase separation in In Al1−As epitaxial layer on InP(001) grown by MOCVD

Author:

Jang Hyunchul,Lee Sang Tae,Song Chang-Hun,Kong Minwoo,Shim Jae-Phil,Shin Seung HeonORCID,Song Keun Man,Choi Young-Su,Kim Donghyun,Park Kyung-Ho,Shin Chan-Soo

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference30 articles.

1. 30 nm In 0.7 Ga 0.3 As Inverted-Type HEMTs with reduced gate leakage current for logic applications;Kim;2009 IEEE Int. Electron Devices Meet. (IEDM). IEEE,2009

2. Nanometre-scale electronics with III–V compound semiconductors;Del Alamo;Nature,2011

3. Metal-organic vapor-phase epitaxy growth of InP-based HEMT structures with InGaAs/InAs composite channel;Sugiyama;2012 Int. Conf. Indium Phosphide Relat. Mater. IEEE,2012

4. InAs thin-channel high-electron-mobility transistors with very high current-gain cutoff frequency for emerging submillimeter-wave applications;Chang;Appl. Phys. Express,2013

5. Sub-100 nm regrown S/D Gate-Last In 0.7 Ga 0.3 As QW MOSFETs with μ n, eff>5,500 cm 2/Vs;Shin;2014 Symp. . VLSI Technol. (VLSI-Technol. ): Dig. Tech. Pap. IEEE,2014

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