The impact of titanium alloying on altering nanomechanical properties and grain structures of sputter-deposited cobalt for electromigration reliability enhancement
Author:
Funder
National Science and Technology Council
Publisher
Elsevier BV
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5. O. Varela Pedreira, M. Lofrano, H. Zahedmanesh, Ph.J. Roussel, M. van der Veen, V. Simons, E. Chery, I. Ciofi, K. Croes, Assessment of critical Co electromigration parameters. In: Proceedings of the 2022 IEEE International Reliability Physics Symposium (IRPS), Dallas, TX, USA, 2022, pp. 8C.2-1–8 C.2-7. 〈https://doi.org/10.1109/IRPS48227.2022.9764427〉.
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