Mechanical properties of nano-structured Ti-Si-N films synthesized by cathodic arc evaporation
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference38 articles.
1. Improving the anticorrosion and mechanical behaviour of PACVD TiN
2. Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure
3. Transmission electron microscopy studies of growth and interface structure of chemically vapour deposited TiC and TiN films on WCCo alloy subsrates
4. Oxidation kinetics of TiN thin films
5. Deposition and characterization of Ti–B–N monolithic and multilayer coatings
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4. Microstructure, mechanical properties, and corrosion resistance of TiSiN coating prepared by FCVA technique with different N2 flow rates;Vacuum;2023-03
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