Investigation on the morphology and surface free energy of the AlGaN thin film
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Reference37 articles.
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2. Effective passivation of AlGaN/GaN HEMTs by ALD-grown AlN thin film;Huang;Electron Device Lett. IEEE,2012
3. Comparative studies of AlGaN/GaN MOS-HEMTs with stacked gate dielectrics by the mixed thin film growth method;Chou;Semicond. Sci. Tech.,2013
4. High power AlGaN ultraviolet light emitters;Shatalov;Semicond. Sci. Technol.,2014
5. Studies on dislocation and surface morphology of AlxGa 1− xN/GaN heterostructures grown by MOCVD;Loganathan;J. Alloy Compd.,2014
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