Polymorphous GdScO 3 as high permittivity dielectric

Author:

Schäfer A.,Rahmanizadeh K.,Bihlmayer G.,Luysberg M.,Wendt F.,Besmehn A.,Fox A.,Schnee M.,Niu G.,Schroeder T.,Mantl S.,Hardtdegen H.,Mikulics M.,Schubert J.ORCID

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference43 articles.

1. Gadolinium scandate as an alternative gate dielectric in field effect transistors on conventional and strained silicon;Roeckerath;Appl. Phys. A Mater. Sci. Process.,2009

2. Amorphous ternary rare-earth gate oxides for future integration in MOSFETs;Lopes;Microelectron. Eng.,2009

3. High mobility strained Si0.5Ge0.5/SSOI short channel field effect transistors with TiN/GdScO3 gate stack;Minamisawa;Microelectron. Eng.,2011

4. p-Type Ion Implantation in Tensile Si/Compressive Si0.5Ge0.5/Tensile Strained Si Heterostructures;Minamisawa;J. Electrochem. Soc.,2011

5. Electrical properties of InAlN/GaN high electron mobility transistor with Al2O3, ZrO2, and GdScO3 gate dielectrics;Cico;J. Vac. Sci. Technol. B,2011

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