Synthesis and high temperature XRD studies of tantalum nitride thin films prepared by reactive pulsed dc magnetron sputtering-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Synthesis and high temperature XRD studies of tantalum nitride thin films prepared by reactive pulsed dc magnetron sputtering

Published:2011-06 Issue:22 Volume:509 Page:6400-6407
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Elangovan T.,Murugeshan S.,Mangalaraj D.,Kuppusami P.,Khan Shabhana,Sudha C.,Ganesan V.,Divakar R.,Mohandas E.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference30 articles.

1. Transition Metal Carbides and Nitrides,1971

2. Effects of processing parameters on the properties of tantalum nitride thin films deposited by reactive sputtering

3. Self-organized lamellar structured tantalum–nitride by UHV unbalanced-magnetron sputtering

4. Microstructure and Thermal Diffusivity Investigations of RF-Sputtered Tantalum Nitride Films

Cited by 33 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stable Oxygen Incorporation in Superconducting TaN: An Experimental and Theoretical Assessment;ACS Omega;2024-08-01

2. Combinatorial Reactive Sputtering with Auger Parameter Analysis Enables Synthesis of Wurtzite Zn₂TaN₃;Chemistry of Materials;2023-08-18

3. Effect of nitrogen content on the mechanical and biological properties of tantalum nitride coatings;Surface and Coatings Technology;2023-07

4. Tantalum oxynitride nanotube film arrays for unconventional nanostructured photo-electrodes active with visible light;Catalysis Today;2023-06

5. Highly Durable Antimicrobial Tantalum Nitride/Copper Coatings on Stainless Steel Deposited by Pulsed Magnetron Sputtering;Micromachines;2022-08-27

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3