Nanoimprinting of Ti–Cu-based thin-film metallic glasses deposited by unbalanced magnetron sputtering-Reference-Cited by-同舟云学术

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Nanoimprinting of Ti–Cu-based thin-film metallic glasses deposited by unbalanced magnetron sputtering

Published:2017-06 Issue: Volume:707 Page:132-136
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Kobata Junpei,Miura Ken-ichi,Amiya Kenji,Fukuda Yasuyuki,Saotome Yasunori

Funder

Grant-in-Aid for Scientific Research

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference27 articles.

1. Recent progress in nanoimprint technology and its applications;Guo;J. Phys. D. Appl. Phys.,2004

2. Nanomoulding with amorphous metals;Kumar;Nature,2009

3. The micro-nanoformability of Pt-based metallic glass and the nanoforming of three-dimensional structures;Saotome;Intermetallics,2002

4. Nanoscale patterning of Zr–Al–Cu–Ni metallic glass thin films deposited by magnetron sputtering;Sharma;J. Nanosci. Nanotechnol.,2005

5. Fabrication of nanodot array mold with 2 Tdot/in.2 for nanoimprint using metallic glass;Fukuda;J. Vac. Sci. Technol. B,2012

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microstructure and Mechanical Properties of Co-Deposited Ti-Ni Films Prepared by Magnetron Sputtering;Coatings;2023-02-27

2. Nanoengineering of Metallic Glasses;Advanced Engineering Materials;2022-07-17

3. Thermoplasticity of metallic glasses: Processing and applications;Progress in Materials Science;2022-06

4. Design and characterization of metallic glass/graphene multilayer with excellent nanowear properties;Friction;2022-04-30

5. Facilitating Complex Thin Film Deposition by Using Magnetron Sputtering: A Review;JOM;2022-04-21

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