Facilitating Complex Thin Film Deposition by Using Magnetron Sputtering: A Review-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Facilitating Complex Thin Film Deposition by Using Magnetron Sputtering: A Review

Published:2022-04-21 Issue:8 Volume:74 Page:3069-3081
ISSN:1047-4838
Container-title:JOM
language:en
Short-container-title:JOM

Author:

Li Jie,Ren Guang-Kun^ORCID,Chen Jiahui,Chen Xuxuan,Wu Wenjie,Liu Yinke,Chen Xiaohong,Song Jiangfeng,Lin Yuan-Hua,Shi Yan

Funder

NSFC

China Academy of Engineering Physics Program

Foundation of President of China Academy of Engineering Physics

Publisher

Springer Science and Business Media LLC

Subject

General Engineering,General Materials Science

Link

https://link.springer.com/content/pdf/10.1007/s11837-022-05294-0.pdf

Reference153 articles.

1. J.E. Davey and T. Pankey, J. Appl. Phys. 39, 1941 (1968).

2. K.G. Gopchandran, B. Joseph, J.T. Abraham, P. Koshy, and V.K. Vaidyan, Vacuum 48, 547 (1997).

3. Y. Tani, Y. Aoi, and E. Kamijo, Appl. Phys. Lett. 73, 1652 (1998).

4. M. Mougenot, A. Caillard, M. Simoes, S. Baranton, C. Coutanceau, and P. Brault, Appl. Catal. B 107, 372 (2011).

5. C. May, R. Menner, J. Strümpfel, M. Oertel, and B. Sprecher, Surf. Coat. Technol. 169–170, 512 (2003).

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Utilizing screen printing technology to fabricate tungsten-rhenium thick film thermocouples with a maximum temperature limit of 1600 °C;Measurement;2025-01

2. Effects of amorphization and interlayer on the hydrogen storage properties of multi-component Ti-V-Zr-Nb-M (M = Mg, Al) alloy films;Journal of Alloys and Compounds;2024-11

3. Microstructures and hydrogen evolution reaction performance of Ru-M(M=Cu, Ni and Nb) system by magnetron sputtering: The mixing enthalpy effect;Journal of Alloys and Compounds;2024-10

4. Sandwich-structured polymer dielectrics exhibiting significantly improved capacitive performance at high temperatures by roll-to-roll physical vapor deposition;Chemical Engineering Journal;2024-10

5. Effects of thickness and gas hydrogenation on the electrochemical performances of a-Si thin film as anode for Ni-MH battery;International Journal of Hydrogen Energy;2024-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3