Fabrication of nanodot array mold with 2 Tdot/in.2 for nanoimprint using metallic glass-Reference-Cited by-同舟云学术

Fabrication of nanodot array mold with 2 Tdot/in.2 for nanoimprint using metallic glass

Published:2012-11 Issue:6 Volume:30 Page:061602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Fukuda Yasuyuki,Saotome Yasunori,Nishiyama Nobuyuki,Takenaka Kana,Saidoh Noriko,Makabe Eiichi,Inoue Akihisa

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4761472

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