Thermodynamic calculation for the chemical vapor deposition of silicon carbonitride
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Ceramics and Composites
Reference24 articles.
1. Dielectric properties of Si3N4–SiCN composite ceramics in X-band;Li;Ceram Int,2012
2. Dielectric and microwave-absorption properties of SiC nanoparticle/SiBCN composite ceramics;Ye;J Eur Ceram Soc,2014
3. Effect of chemical vapor infiltration of SiC on the mechanical and electromagnetic properties of Si3N4–SiC ceramic;Li;Scripta Mater,2010
4. Microstructure and mechanical properties of Si3N4/SiC composites;Hirano;Mater Lett,1995
5. Fabrication, mechanical properties and microstructure analysis of Si3N4/SiC nanocomposite;Cheong;Compos A,1999
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