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Preparation of SiOC nanocomposite films by laser chemical vapor deposition

  • Published:2016-02 Issue:3 Volume:36 Page:403-409
  • ISSN:0955-2219
  • Container-title:Journal of the European Ceramic Society
  • language:en
  • Short-container-title:Journal of the European Ceramic Society

Author:

Yu Shu,Tu Rong,Goto Takashi

Funder

National Natural Science Foundation of China

National High-tech R&D Program

National Key Basic Research Support Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Ceramics and Composites

Reference35 articles.

1. Silicon oxycarbide glasses: part II. Structure and properties;Renlund;J. Mater. Res.,1991

2. Silicon oxycarbide glasses;Pantano;J. Sol–Gel Sci. Technol.,1999

3. Pressureless sintering of Si;Omori;J. Am. Ceram. Soc.,1982

4. Progress in silicon-based non-oxide structural ceramics;Dressler;Int. J. Refract. Met. Hard Mater.,1997

5. Synthesis and characterization of silicon oxycarbide glasses;Zhang;J. Am. Ceram. Soc.,1990

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