Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory-Reference-Cited by-同舟云学术

Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory

Published:1997-05 Issue:1-3 Volume:60 Page:212-218
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Reynaerts Dominiek,Heeren Paul-Henri's,Van Brussel Hendrik

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Non-conventional Machining Technologies;Kruth,1993

2. Micro spark erosion;van Osenbruggen;Philips Technisch Tijdschrift,1969

3. Japan's micromachining initiative forces U.S. government into another prickly position,1991

4. Electro-discharge machine for micro-hole drilling;Sato;National Technical Report,1985

5. Drilling of deep microholes by EDM;Masuzawa;Ann. CRIP,1989

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