Determination of the mechanical properties of microstructures-Reference-Cited by-同舟云学术

Determination of the mechanical properties of microstructures

Published:1996-06 Issue:1-3 Volume:54 Page:750-754
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ye X.Y.,Zhou Z.Y.,Yang Y.,Zhang J.H.,Yao J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Young's modulus measurements of thin films using micromechanics;Petersen;J. Appl. Phys.,1979

2. Determination of Young's moduli of micromechanical thin films using the resonance method;Kiesewetter;Sensors and Actuators A,1992

3. Measurement of the mechanical properties of silicon microresonators;Zhang;Sensors and Actuators A,1991

4. Aging phenomena in heavily doped (p+) micromachined silicon cantilever beams;Tabib-Azar;Sensors and Actuators A,1992

5. Measurement of mechanical properties of silicon microstructures;Ye,1994

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