Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Attia P, Hesto P (1998) Dependence of the resonant frequency of micromachined gold microbeams on polarisation voltage. Microelec J 29:543–546
2. Bergaud C, Nicu L, Martinez A, Gerard P, Benzohra MH (1999) Multi-mode frequency analysis for the dynamic characterization of microstructures D. In: Proceedings of Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, Paris France, April 1999; SPIE: Paris, France 3680, pp 757–764
3. Bourouina H, Yahiaoui R, Majlis BY, Hasseinbey A, Benamar MEA, Sahar A (2014) FEM analysis for the influence of manufacturing process defects on dynamic behavior of thin chromium microbeam. Appl Mech Mater 548:958–962
4. Boyd EJ, Li L, Blue R, Uttamchandani D (2013) Measurement of the temperature coefficient of Young’s modulus of single crystal silicon and 3C silicon carbide below 273 K using micro-cantilevers. Sens Actuators A 198:75–80
5. Doyle JF (1991) Static and dynamic analysis of structures: with an emphasis on mechanics and computer matrix methods. vol 6. Springer Science and Business Media, Dordrecht, p 146. doi: 10.1007/978-94-011-3420-01991
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献