Author:
Mizuno Jun,Nottmeyer Kay,Cabuz Cleopatra,Minami Kazuyuki,Kobayashi Takashi,Esashi Masayoshi
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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3. Precision accelerometer with μg resolution;Rudolf;Sensors and Actuators,1990
4. Study of acceleration sensitivities in silicon rate sensors;Maenaka,1994
5. Silicon monolithic micromechanical gyroscope;Grief,1991
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