Micromachined capacitive accelerometer-Reference-Cited by-同舟云学术

Micromachined capacitive accelerometer

Published:1991-05 Issue:1-3 Volume:27 Page:555-558
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Gerlach-Meyer U.E.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

1. A batch fabricated silicon accelerometer;Roylance;IEEE Trans. Electron Devices,1979

2. Silicon micromechanical devices;Angell;Sci. Am.,1983

3. A micromechanical capacitive accelerometer with a two point inertial mass suspension;Rudolf;Sensors and Actuators,1984

4. Solid state accelerometer for microgravity applications;Rudolf;Tech. Rep.,1985

5. Design optimization for cantilever-type accelerometers;Seidel;Sensor and Actuators,1984

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