Micromachined piezoelectric membrane acoustic device-Reference-Cited by-同舟云学术

Micromachined piezoelectric membrane acoustic device

Published:2003-01 Issue:1-2 Volume:103 Page:130-134
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ko Sang Choon,Kim Yong Chul,Lee Seung Seob,Choi Seung Ho,Kim Sang Ryong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference4 articles.

1. C.H. Han, E.S. Kim, Parylene-diaphragm piezoelectric acoustic transducers, MEMS’00, 2000, pp. 148–152.

2. Piezoelectric microphone with on-chip CMOS circuits;Ried;J. MEMS,1993

3. Piezoelectric cantilever microphone and microspeaker;Lee;J. MEMS,1996

4. J.J. Neumann Jr., K.J. Gabriel, CMOS-MEMS membrane for audio-frequency acoustic actuation, MEMS’01, 2001, pp. 236–239.

Cited by 158 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration;Journal of Micromechanics and Microengineering;2024-08-28

2. On the Performance Enhancement of Piezoelectric MEMS Microphone Using S-Shape Slit Design;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. Utilizing Cymbopogon Proximus Grass Extract for Green Synthesis of Zinc Oxide Nanorod Needles in Dye Degradation Studies;Molecules;2024-01-10

4. Super-sensitive graphene nano-fabric drum at the macroscale;Cell Reports Physical Science;2024-01

5. MEMS audio speakers ^*;Journal of Micromechanics and Microengineering;2023-11-29