Author:
Neumann J.J.,Gabriel K.J.
Cited by
12 articles.
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2. Analysis and design of an electrostatic MEMS microphone using the PolyMUMPs process;Analog Integrated Circuits and Signal Processing;2015-01-13
3. (Invited) CMOS MEMS Integration;ECS Transactions;2011-04-25
4. Patternable pyrolyzed carbon microspeaker;2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS);2010-01
5. Noise in MEMS;Measurement Science and Technology;2009-11-06