Author:
Chen Jing,Liu Litian,Li Zhijian,Tan Zhimin,Xu Yang,Ma Jun
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Acoustic sensors;Sessler;Sens. Actuators A,1991
2. A review of silicon microphones;Scheeper;Sens. Actuators A,1994
3. P. Rombach, M. Mullenborn, U. Klein, K. Rasmussen, The first low voltage, low noise differential silicon microphone, technology development and measurement results, in: Proceedings of the 14th IEEE International Micro Electro Mechanical Systems Conference (MEMS’2001), Interlaken, Switzerland, January 2001, pp. 42–45.
4. Design and fabrication of silicon condenser microphone using corrugated diaphragm technique;Zou;J. Microelectromech. Syst.,1996
5. The design, fabrication, and testing of corrugated silicon nitride diaphragms;Scheeper;J. Microelectromech. Syst.,1994
Cited by
29 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献