1. Microelectromechanical systems;Mehregany;Circuits and Devices,1993
2. Fabrication of microstructures using the LIGA process;Ehrfeld,1987
3. Deep x-ray and uv lithographies for micromechanics;Guckel,1990
4. Fabrication of high depth-to-width aspect ratio microstructures;Engelmann,1992
5. High aspect ratio electroplated microstructures using a photosensitive polyimide process;Frazier,1992