Author:
Choi W.K.,Thong J.T.L.,Luo P.,Tan C.M.,Chua T.H.,Bai Y.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. TMAHW etchants for silicon micromachining, Tech. Dig.;Schnakenberg,1991
2. Anisotropic etching of silicon in (CH3)4NOH solutions, Tech. Dig.;Tabata,1991
3. TMAH etching of silicon and the interaction of etching parameters;Thong;Sensors and Actuators A,1997
4. Anisotropic etching of crystalline silicon in alkaline solutions;Seidel;J. Electrochem. Soc.,1991
5. Preparation of silicon thin diaphragms free from micropyramids using anisotropic etching in KOH solutions;Matsuoka;J. Chem. Engineering of Japan,1992
Cited by
28 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献