Vertically driven microactuators by electrothermal buckling effects-Reference-Cited by-同舟云学术

Vertically driven microactuators by electrothermal buckling effects

Published:1998-11 Issue:1-2 Volume:71 Page:35-39
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lin Liwei,Lin Shiao-Hong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. IC-processed micromotors;Fan;IEDM,1988

5. Fabrication and testing of the planar magnetic micromotor;Guckel;J. Micromech. Microeng,1991

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