Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy-Reference-Cited by-同舟云学术

Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy

Published:1998-01 Issue:1 Volume:64 Page:1-6
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Akiyama Terunobu,Tonin Andreas,Hidber Hans-Rudolf,Brugger Jürgen,Vettiger Peter,Staufer Urs,de Rooij Nico. F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Atomic resolution with an atomic force microscope using piezoresistive detection;Tortonese;Appl. Phys. Lett.,1993

2. Atomic force microscopy and lateral force microscopy using piezoresistive cantilevers;Linnemann;J. Vac. Sci. Technol. B,1996

3. Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope;Fujii;J. Vac. Sci. B,1995

4. Atomic force microscopy using cantilevers with integrated tips and piezoelectric layer for actuation and detection;Indermühle,1996

5. Independent parallel scanning force microscopy using Pb(Zr,Ti)O3 microcantilever array;Itoh,1997

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor;IEEE Sensors Journal;2024-06-15

2. Design of Si0.5Ge0.5 Sourced Nano-cantilever Pressure Sensor Based on Charge Plasma and Gate Stacked Nanowire Tunnel Field Effect Transistor;Silicon;2023-08-25

3. Design of Si0.5Ge0.5 Sourced Nano-cantilever Pressure Sensor Based on Charge Plasma and Gate Stacked Nanowire Tunnel Field Effect Transistor;2023-05-16

4. Nanocantilever tri-gate junctionless cuboidal nanowire-FET-based directional pressure sensor;Applied Physics A;2019-11-06

5. Precise mass determination of single cell with cantilever-based microbiosensor system;PLOS ONE;2017-11-21