Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor-Reference-Cited by-同舟云学术

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Modeling and Feasibility Study of a Micro-Machined Microphone Based on the Piezoresistive Effect of a Field-Effect Transistor

Published:2024-06-15 Issue:12 Volume:24 Page:18903-18915
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Kim Chayeong¹^ORCID,Noh Eunsik¹^ORCID,Shin Kumjae²^ORCID,Moon Wonkyu¹^ORCID

Affiliation:

1. Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), Pohang-si, Gyeongsangbuk-do, Republic of Korea

2. Mobility System Group, Korea Institute of Industrial Technology (KITECH), Gyeongsan-si, Gyeongsangbuk-do, Republic of Korea

Funder

National Research Foundation of Korea (NRF) through Korea government

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7361/10558706/10521455.pdf?arnumber=10521455

Reference40 articles.

1. The Evolution of Integrated Interfaces for MEMS Microphones

2. A Review of MEMS Capacitive Microphones

3. A review of silicon microphones

4. A commercialized MEMS microphone for high‐volume consumer electronics

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