A new technology for fluidic microsystems based on PCB technology-Reference-Cited by-同舟云学术

A new technology for fluidic microsystems based on PCB technology

Published:1999-10 Issue:2 Volume:77 Page:98-105
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Merkel Tobias,Graeber Michael,Pagel Lienhard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. G. Herrmann (Publisher), Handbuch der Leiterplattentechnik, Band 3, Eugen G. Leuze Verlag, Saulgau, 1993.

2. L. Pagel, T. Merkel, M. Gräber, Fluidische Mikrosysteme in Leiterplattentechnologie-Kompatibilität zur Elektrotechnik, in: 3. Magdeburger Maschinenbautage, Logos Verlag, Berlin, 1997.

3. Future of actuators and microsystems;Fujita;Sensors and Actuators A,1996

4. A bidirectional silicon micropump;Zengerle;Sensors and Actuators A,1995

5. Low-cost silicon sensors for mass flow measurement of liquids and gases;Nguyen;Sensors and Actuators A,1995

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