Low-cost silicon sensors for mass flow measurement of liquids and gases-Reference-Cited by-同舟云学术

Low-cost silicon sensors for mass flow measurement of liquids and gases

Published:1995-06 Issue:1-2 Volume:49 Page:17-20
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nguyen N.T.,Kiehnscherf R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Monolithic flow sensor for measuring millilitre per minute liquid flow;Yang;Sensors and Actuators A,1992

2. A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications;Johnson;Sensor and Actuators,1987

3. An integrated sensor for invasive blood velocity measurement;Kersjes;Sensors and Actuators A,1993

4. Elektrokalorischer Durchflußmengensensor für Gase und Öle;Kiehnscherf;F&M Feinwerktechnik Mikrotechnik Messtechnik,1994

5. A micro-machined flow sensor for liquid and gaseous fluids;Kohl;Sensors and Actuators A,1994

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