Monolithic flow sensor for measuring millilitre per minute liquid flow

Author:

Yang Canqian,Søeberg Henrik

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. A transit-time flow meter for measuring milliliter per minute liquid flow;Yang;Rev. Sci. Instrum,1988

2. New integrated gas-flow sensor with duty cycle output;Pan;Electron. Lett,1988

3. Monolithic Si air flow sensor for flow velocity sensing;Sekimura;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987

4. A CMOS integrated silicon gas flow sensor with pulse-modulated output;Stemme;Proc. 4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987

5. Monolithic integrated direction-sensitive flow sensor;Huijsing;IEEE Trans. Electron Devices,1982

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