Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference61 articles.
1. Silicon micromechanics: sensors and actuators on a chip;Howe;IEEE Spectrum,1991
2. Engineering microscopic machines;Gabriel;Scientific American,1995
3. Integrated movable micromechanical structures for sensors and actuators;Fan;IEEE Trans. Electron Devices,1988
4. Integrated fabrication of polysilicon micro-mechanisms;Mehregany;IEEE Trans. Electron Devices,1988
5. Micromechanical systems;Trimmer,1990
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