Dynamic simulation model for a vibrating fluid density sensor

Author:

Veijola Timo,Corman Thierry,Enoksson Peter,Stemme Göran

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. A silicon resonant sensor structure for coriolis mass-flow measurements;Enoksson;Journal of Microelectromechanical Systems,1997

2. Fluid density sensor based on resonance vibration;Enoksson;Sensors and Actuators A,1995

3. G.A.S. Machado (Ed.), Low-Power HF Microelectronics—a unified approach, Ch. 9, IEE Circuits and Systems, 1996.

4. Equivalent circuit model of the squeezed gas film in a silicon accelerometer;Veijola;Sensors and Actuators A,1995

5. J.M. Gomez-Cama, O. Ruiz, S. Marco, J.M. Lopez-Villegas, J. Samitier, Simulation of a torsional capacitive accelerometer and interface electronics using an analog hardware description language, in: MICROSIM II Simulation and Design of Microsystems and Microstructures, Lausanne, 1997, pp. 189–198.

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