Microscale Effect of Elastic Beam of the Micro-Machined Gyroscope

Abstract

A detailed analysis of the concept of strain energy density and strain gradient on the material microscale effect in a micro-machined gyroscope is carried out. By analysis, the material microscale effect mainly influences its elastic modulus. The analytical expression of the valid elastic modulus on the micro elastic beam structure of the micro-machined gyroscope is deduced. When considering the valid elastic modulus and not, respectively compare the natural frequency of the elastic beam with the actual measurement results. The error of former is far less than the latter. By the theoretical derivation and experiment test, the influence of the material microscale effect on the micro-machined gyroscope is analyzed.