Author:
Jang Jaesung,Lee Seung S.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Microfluidics — review;Gravesen;J. Micromech. Microeng.,1993
2. Microflow devices and systems;Shoji;J. Micromech. Microeng.,1994
3. Electrostatically actuated gas valve with large conductance;Shikida;Tech. Dig. IEEE Transducers,1993
4. Lightly-doped polysilicon bridges as a flow meter;Tai;Sensors and Actuators,1988
5. Review: MEMS and its applications for flow control;Ho;Journal of Fluids Engineering,1996
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