REVIEW: MEMS and Its Applications for Flow Control-Reference-Cited by-同舟云学术

REVIEW: MEMS and Its Applications for Flow Control

Published:1996-09-01 Issue:3 Volume:118 Page:437-447
ISSN:0098-2202
Container-title:Journal of Fluids Engineering
language:en
Short-container-title:

Author:

Ho Chih-Ming¹,Tai Yu-Chong²

Affiliation:

1. Mechanical and Aerospace Engineering Department, University of California, Los Angeles, Los Angeles, CA 90095

2. Division of Engineering and Applied Science, California Institute of Technology, Pasadena, CA 91125

Abstract

Emerging micromachining technology enables us to fabricate mechanical parts on the order of micron size. It provides us with micro-sensors and micro-actuators which facilitate the exploration of all areas of science. Furthermore, these miniature transducers can be integrated with microelectronics. With an integrated system, it then becomes possible to complete the loop of sensing, information processing, and actuation. This type of system enables us to perform real-time control of time varying events which are common in fluid dynamics. In this review paper, we will first briefly introduce Micro-Electro-Mechanical-Systems (MEMS) technology. Then, the applications of MEMS to flow control will be discussed.

Publisher

ASME International

Subject

Mechanical Engineering

Link

http://asmedigitalcollection.asme.org/fluidsengineering/article-pdf/118/3/437/5900465/437_1.pdf

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