Author:
Lapadatu A.Cozma,De Bruyker D,Jakobsen H,Puers R
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Accelerometer systems with self-testable features;Aleen;Sens. Actuators, A,1989
2. F. Pourahmadi, L. Christel, K. Petersen, Tech. Digest, IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 1992, p. 122.
3. Electrostatic actuation as a self-testing method for silicon pressure sensors;Cozma;Sens. Actuators, A,1997
4. A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation;De Bruyker;Sens. Actuators, A,1998
5. Thermal actuation units for microvalves and micropumps;Freygang,1996
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