Electrostatic actuation as a self-testing method for silicon pressure sensors-Reference-Cited by-同舟云学术

Electrostatic actuation as a self-testing method for silicon pressure sensors

Published:1997-05 Issue:1-3 Volume:60 Page:32-36
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Cozma Adriana,Puers Robert

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference3 articles.

1. Accelerometer systems with self-testable features;Aleen;Sensors and Actuators,1989

2. Electrostatic forces and their effects on capacitive mechanical sensors;Puers;Sensor and Actuators A,1996

3. Process development for 3D silicon microstructures, with application to mechanical sensor devices;Peeters,1994

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