Mechanical behavior of a rectangular capacitive micro-plate subjected to an electrostatic load-Reference-Cited by-同舟云学术

Mechanical behavior of a rectangular capacitive micro-plate subjected to an electrostatic load

Published:2022-01-08 Issue:5 Volume:10 Page:1337-1348
ISSN:2195-268X
Container-title:International Journal of Dynamics and Control
language:en
Short-container-title:Int. J. Dynam. Control

Author:

Kalhori Hamed,Shooshtari Alireza,Tashakori Shabnam,Li Bing

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Control and Optimization,Mechanical Engineering,Modeling and Simulation,Civil and Structural Engineering,Control and Systems Engineering

Link

https://link.springer.com/content/pdf/10.1007/s40435-021-00894-1.pdf

Reference32 articles.

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3. Zhao X (2004) Modeling and simulation of MEMS Devices. Dissertation, Virginia Tech

4. Younis MI, Abdel-Rahman EM, Nayfeh A (2003) A reduced-order model for electrically actuated microbeam-based MEMS. J Microelectromech Syst 12(5):672–680

5. Zhang XM, Chau FS, Quan C, Lam YL, Liu AQ (2001) A study of the static characteristics of a torsional micromirror. Sens Actuators, A 90(1–2):73–81

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