Anemometer with hot platinum thin film-Reference-Cited by-同舟云学术

Anemometer with hot platinum thin film

Published:2001-10 Issue:1-2 Volume:94 Page:32-38
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Mailly F,Giani A,Bonnot R,Temple-Boyer P,Pascal-Delannoy F,Foucaran A,Boyer A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

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4. Two-dimensional gas flow sensors by CMOS IC technology;Robadey;J. Micromech. Microeng.,1995

5. Design of a low power SnO2 gas sensor integrated on silicon oxynitride membrane;Astié;Sens. Actuators,2000

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