A silicon flow sensor for gases and liquids using AC measurements-Reference-Cited by-同舟云学术

A silicon flow sensor for gases and liquids using AC measurements

Published:2000-08 Issue:1-3 Volume:85 Page:124-132
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bedö Gerlinde,Fannasch Heike,Müller Rudolf

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. High-sensitivity 2-D flow sensor with etched thermal isolation structure;van Oudheusden;Sens. Actuators, A,1995

2. Silicon thermal flow sensors;van Oudhesuden;Sens. Actuators, A,1992

3. Fabrication and modelling of CMOS microbridge gas-flow sensors;Moser;Sens. Actuators, B,1992

4. Monolithic flow sensor for measuring mililitre per minute liquid flow;Yang;Sens. Actuators, A,1992

5. Micro-liquid flow sensor;Lammerink;Sens. Actuators, A,1993

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