Author:
Hung Shih-Ta,Wong Shwin-Chung,Fang Weileun
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Micro-liquid flow sensor;Lammerink;Sens. Actuators, A,1993
2. Fabrication and modeling of CMOS microbridge gas flow sensors;Moser;Sens. Actuators, B,1992
3. Analytical 2D-model of CMOS micromachined gas flow sensor;Wachutka,1991
4. A polysilicon flow sensor for gas flow meter;Neda;Sens. Actuators, A,1996
5. A high sensitive CMOS gas flow sensor on a thin dielectric membrane;Moser;Sens. Actuators, A,1993
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56 articles.
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