Author:
Neda Tokudai,Nakamura Kenichi,Takumi Tsugihiko
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. The fluidic flowmeter — a gas flowmeter based on fluidic dynamic oscillation;Sakai;Flow Meas. Instrum.,1989
2. A very wide range vector pyroelectric anemometer;Hsieh;Micromechanical Sensors, Actuators and Systems, ASME 1991,1991
3. Polysilicon-bridges for anenometer applications;Tai,1985
4. A monolithic gas flow sensor with polyimide as thermal insulator;Stemme;IEEE Trans Electron Devices,1986
5. A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications;Johnson;Sensors and Actuators,1987
Cited by
81 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献