Ge-film resistance and Si-based diode temperature microsensors for cryogenic applications

Author:

Boltovets N.S.,Kholevchuk V.V.,Konakova R.V.,Mitin V.F.,Venger E.F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Cryogenic thermometry: a review of progress since 1982;Rubin;Cryogenics,1997

2. All-purpose technology of physical sensors on the base of Ge/GaAs heterostructures;Mitin;Microelectron. J.,1997

3. Ge/GaAs heterostructure: preparation, properties, and application to sensors;Mitin;Mol. Phys. Reports,1998

4. Low-temperature Ge-film resistance thermometers;Mitin;Sens. Actuators A,1998

5. Resistance thermometers based on the germanium films;Mitin;Semiconductor Phys., Quantum Electron. Optoelectron.,1999

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