High precision electron beam positioning using computer image analysis for electron beam testing-Reference-Cited by-同舟云学术

High precision electron beam positioning using computer image analysis for electron beam testing

Published:1987-01 Issue:2-4 Volume:7 Page:223-229
ISSN:0167-9317
Container-title:Microelectronic Engineering
language:en
Short-container-title:Microelectronic Engineering

Author:

Michener John R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. A Class of Algorithms for Fast Digital Registration;Barena;IEEE Transactions on Computers,1972

2. Spatial Registration of Multispectral and Multitemporal Digital Imagery Using Fast Fourier Transform Techniques;Anuta;IEEE Transactions on Geoscience Electronics,1970

3. Algorithms for Subpixel Registration;Tian;Computer Vision Graphics and Image Processing,1986

4. Digital Image Registration Using Projections;Alliney;IEEE Transactions on Pattern Analysis and Machine Intelligence,1986

5. Optimal Edge Detector Design 1: Parameter Selection and Noise Effects;Lunscher;IEEE Transactions on Pattern Analysis and Machine Intelligence,1986

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1. FACE: A failure analysis and characterization environment for E-beam testing;Microelectronics Reliability;1993-05

2. Principles and Applications;Electron Beam Testing Technology;1993

3. Measuring rotations in S.E.M. images of integrated circuits;Microelectronic Engineering;1992-03

4. Fine positioning and signal processing techniques for automatic waveform comparison;Microelectronic Engineering;1992-03

5. Fundamentals of electron beam testing via capacitive coupling voltage contrast;Microelectronic Engineering;1990-05