Author:
Pantel R,Wehbe-Alause H,Jullian S,Kwakman L.F.Tz
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Fabrication of tungsten films by metallorganic chemical vapor deposition;International Journal of Minerals, Metallurgy, and Materials;2012-12
2. Characterization;Handbook of Semiconductor Interconnection Technology, Second Edition;2006-02-22