Author:
Passemard Gérard,Fugier Pascal,Noel Patrice,Pires Fabrice,Demolliens Olivier
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. Proc. IEEE VMIC;Yu,1990
2. Low Dielectric Constant Interlayer Using Fluorine-Doped Silicon Oxide
3. Ext. Abs. Conf. SSDM;Lee,1995
4. Ext. Abs. Conf. SSDM;Hayasaka,1995
5. Proc. IEEE VMIC;Pai,1995
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献