Performance Improvement of Low-Temperature Polycrystalline Silicon Thin-Film Transistors with Fluorinated Silicate Glass Drive-In Masking Layer
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Published:2012-10-03
Issue:
Volume:51
Page:106502
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:en
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Fan Ching-Lin,Lin Yi-Yan,Wang Shou-Kuan,Shang Min-Chi,Lin Wei-Chun
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering