SiC Films and Coatings
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Publisher
Elsevier
Reference106 articles.
1. TEM investigation of silicon carbide wafers with reduced micropipe density;Saddow;J Electron Mater,2000
2. SiC-4H epitaxial layer growth by trichlorosilane (TCS) as silicon precursor at very high growth rate;La Via;Mater Sci Forum,2009
3. The material quality of CVD-grown SiC using different carbon precursors;Hallin;J Cryst Growth,1998
4. SiC formation by reaction of Si(001) with acetylene: electronic structure and growth mode;Dufour;Phys Rev B,1997
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