Author:
Soler-Carracedo K.,Estévez-Alonso P.,Martin I.R.,Rios S.
Funder
Gobierno de Canarias Consejería de Educación y Universidades
Gobierno de España Ministerio de Ciencia e Innovación
Subject
Condensed Matter Physics,Biochemistry,General Chemistry,Atomic and Molecular Physics, and Optics,Biophysics
Reference54 articles.
1. Development of variable capacitance pressure transducers for vacuum applications;Sullivan;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.,1985
2. Various applications of resonant pressure sensor chip based on 3-D micromachining;Harada;Sens. Actuators A Phys.,1999
3. Recommended practice for calibrating vacuum gauges of the thermal conductivity type;Ellefson;J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.,2000
4. Total Pressure Measurements in Vacuum Technology;Berman,2014
5. Foundations of Vacuum Science and Technology;Lafferty,1998
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献