Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process

Author:

Lee Jung-Hwan,Poddar Maneesh Kumar,Yerriboina Nagendra Prasad,Ryu Heon-Yul,Han Kwang-Min,Kim Tae-Gon,Hamada Satomi,Wada Yutaka,Hiyama Hirokuni,Park Jin-Goo

Funder

Hanyang University

Publisher

Elsevier BV

Subject

Polymers and Plastics,Organic Chemistry

Reference25 articles.

1. Effect of viscoelasticity of PVA brush on friction during post-CMP cleaning: a guideline for nodule configuration;Hara;Solid State Phenom.,2015

2. Effect of brush treatment and brush contact sequence on cross contaminated defects during CMP in-situ cleaning;Kim;J. Korean Soc. Tribol. Lubr. Eng.,2015

3. Investigation of eccentric PVA brush behaviours in post-Cu CMP cleaning;Sun;Microelectron. Eng.,2012

4. A novel design of brush scrubbing in post-CMP cleaning;Qi;Int. J. Mach.Tool Manuf.,2014

5. Friction force monitoring system in post-CMP cleaning for correlations with process issues;Shin,2011

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